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SPIE Proceedings [SPIE San Jose - DL tentative - San Jose, CA (Friday 1 November 1991)] Vibration Control in Microelectronics, Optics, and Metrology - New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope
Shen, Zhang, Tao, ChunKan, Gordon, Colin G.Volume:
1619
Year:
1992
Language:
english
DOI:
10.1117/12.56829
File:
PDF, 250 KB
english, 1992