SPIE Proceedings [SPIE San Jose - DL tentative - San Jose, CA (Friday 1 November 1991)] Vibration Control in Microelectronics, Optics, and Metrology - Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology
Hong, Westwood K. W., Boulter, Nicholas, Gordon, Colin G.Volume:
1619
Year:
1992
Language:
english
DOI:
10.1117/12.56836
File:
PDF, 1.06 MB
english, 1992