SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Fabrication of PZT microdevices using a high-yield sol-gel process
Hu, Min, Chiao, Jung-Chih, Jamieson, David N., Du, Hejun, Xie, Jin, Faraone, Lorenzo, Dzurak, Andrew S., Ling, Shih-Fu, Fu, YongqingVolume:
5650
Year:
2004
Language:
english
DOI:
10.1117/12.581395
File:
PDF, 740 KB
english, 2004