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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV - Lifetime characterization of capacitive RF MEMS switches
Ziaei, Afshin, Tanner, Danelle M., Ramesham, Rajeshuni, Dean, Thierry, Polizzi, Jean-PhilippeVolume:
5716
Year:
2005
Language:
english
DOI:
10.1117/12.590132
File:
PDF, 290 KB
english, 2005