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SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Advances in Resist Technology and Processing IX - tert-Butoxycarbonylated novolac resins as chemically amplified imaging materials
Gozdz, Antoni S., Shelburne III, John A., Novembre, Anthony E.Volume:
1672
Year:
1992
Language:
english
DOI:
10.1117/12.59729
File:
PDF, 749 KB
english, 1992