SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source
Ellwi, Samir, Mackay, R. Scott, Comley, Andrew, Hay, Nick, Henderson, Ian, Brownell, MichaelVolume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.598721
File:
PDF, 161 KB
english, 2005