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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 22 January 2005)] Commercial and Biomedical Applications of Ultrafast Lasers V - Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair
Haight, Richard, Neev, Joseph, Schaffer, Christopher B., Wagner, Alfred, Longo, Peter, Ostendorf, Andreas, Nolte, Stefan, Lim, DaeyoungVolume:
5714
Year:
2005
Language:
english
DOI:
10.1117/12.601008
File:
PDF, 875 KB
english, 2005