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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Relaxation mechanism of SiGe thin film on SOI substrate
Di, Zengfeng, Zhang, Miao, Liu, Weili, Zhu, Ming, Lin, Chenglu, Chu, Paul K., Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607906
File:
PDF, 388 KB
english, 2012