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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Ge and GeOx films as sacrificial layer for MEMS technology based on piezoelectric AlN: etching and planarization processes (Invited Paper)
Sangrador, J., Olivares, J., Iborra, E., Vergara, L., Clement, M., Sanz-Hervas, A., Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, FernandoVolume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.608244
File:
PDF, 415 KB
english, 2005