SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Investigation of ion-implanted layers by x-ray reflectometry method
Touryanski, A. G., Gerasimenko, N. N., Aprelov, S. A., Pirshin, I. V., Poprygo, A. I., Senkov, V. M., Kumakhov, Muradin A., Hoover, Richard B.Year:
2012
Language:
english
DOI:
10.1117/12.637912
File:
PDF, 218 KB
english, 2012