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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - Dynamic analysis of a compliant bistable micromechanism with one DOF system
Chiao, Jung-Chih, Tsay, Jinni, Sung, Cheng-Kuo, Dzurak, Andrew S., Jagadish, Chennupati, Thiel, David V.Volume:
6037
Year:
2005
Language:
english
DOI:
10.1117/12.638351
File:
PDF, 566 KB
english, 2005