SPIE Proceedings [SPIE Lasers and Applications in Science...

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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Laser-based Micropackaging - Laser slotting of silicon for inkjet printer heads

Mai, Tuan Anh, Bachmann, Friedrich G., Hoving, Willem, Perrottet, Delphine, Wiki, Max, Lu, Yongfeng, Washio, Kunihiko, Richerzhagen, Bernold
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Volume:
6107
Year:
2006
Language:
english
DOI:
10.1117/12.641382
File:
PDF, 457 KB
english, 2006
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