SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications
Bahadur, Issam B., Tanner, Danelle M., Ramesham, Rajeshuni, Mills, James K.Volume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.644429
File:
PDF, 298 KB
english, 2006