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SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Emerging Lithographic Technologies X - Organic-inorganic hybrid materials for nanoimprint lithography
Katayama, Junko, Lercel, Michael J., Yamaki, Shigeru, Mitsuyama, Masahiro, Hanabata, MakotoVolume:
6151
Year:
2006
Language:
english
DOI:
10.1117/12.655053
File:
PDF, 399 KB
english, 2006