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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] MEMS, MOEMS, and Micromachining II - Tunable Fabry-Perot filters operating in the 3 to 5 μm range for infrared micro-spectrometer applications
Antoszewski, Jaroslaw, Ürey, Hakan, El-Fatatry, Ayman, Keating, Adrian, Winchester, Kevin, Nguyen, Thuyen, Silva, Dilusha, Musca, Charles, Dell, John, Samardzic, Olivia, Faraone, LorenzoVolume:
6186
Year:
2006
Language:
english
DOI:
10.1117/12.662539
File:
PDF, 510 KB
english, 2006