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SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - EUV multilayer mirrors with enhanced stability
Benoit, Nicolas, Khounsary, Ali M., Morawe, Christian, Yulin, Sergiy, Feigl, Torsten, Kaiser, NorbertVolume:
6317
Year:
2006
Language:
english
DOI:
10.1117/12.680719
File:
PDF, 907 KB
english, 2006