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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums
Borisov, S. S., Zaitsev, S. I., Bloshenko, A., Misutina, T., Filachev, Anatoly M.Year:
2012
Language:
english
DOI:
10.1117/12.693212
File:
PDF, 282 KB
english, 2012