SPIE Proceedings [SPIE Photomask and Next-Generation...

  • Main
  • SPIE Proceedings [SPIE Photomask and...

SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - New PEC optimization for the mask fabrication of sub-50nm memory device

Lee, Sanghee, Watanabe, Hidehiro, Ryu, Dongguk, Park, Junghoon, Nam, Dongseok, Kim, Heebom, Kim, Byunggook, Woo, Sanggyun, Cho, Hanku
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6607
Year:
2007
Language:
english
DOI:
10.1117/12.728988
File:
PDF, 659 KB
english, 2007
Conversion to is in progress
Conversion to is failed