SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in X-Ray/EUV Optics and Components II - High-performance multilayer coatings for 106 nm
Taracheva, Elena, Khounsary, Ali M., Morawe, Christian, Yulin, Sergiy, Feigl, Torsten, Goto, Shunji, Kaiser, NorbertVolume:
6705
Year:
2007
Language:
english
DOI:
10.1117/12.735482
File:
PDF, 405 KB
english, 2007