SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Lateral interactions between standard cells using pattern matching
Wang, Lynn Tao-Ning, Naber, Robert J., Kawahira, Hiroichi, Neureuther, Andrew R.Volume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.746758
File:
PDF, 464 KB
english, 2007