SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 19 January 2008)] Photon Processing in Microelectronics and Photonics VII - Direct photo-etching of PMMA by focused EUV radiation from a compact laser plasma source
Barkusky, Frank, Holmes, Andrew S., Meunier, Michel, Bayer, Armin, Peth, Christian, Arnold, Craig B., Niino, Hiroyuki, Mann, Klaus, Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6879
Year:
2008
Language:
english
DOI:
10.1117/12.762553
File:
PDF, 1.23 MB
english, 2008