SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - Characterization of microresistance welding with electrothermal actuator for microassembly
Chang, Chun-Wei, Hartzell, Allyson L., Ramesham, Rajeshuni, Hsu, WensyangVolume:
6884
Year:
2008
Language:
english
DOI:
10.1117/12.765665
File:
PDF, 852 KB
english, 2008