SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Residual stresses around femtosecond laser ablated grooves in silicon wafer evaluated by nanoindentation
Cao, Yongzhi, Wang, Yanshen, Dong, Shen, Yang, Yanqiang, Liang, Yingchun, Sun, Tao, Han, Sen, Xing, Tingwen, Li, Yanqiu, Cui, ZhengVolume:
6724
Year:
2007
Language:
english
DOI:
10.1117/12.782835
File:
PDF, 367 KB
english, 2007