SPIE Proceedings [SPIE Photomask Technology - Monterey, CA...

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SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 6 October 2008)] Photomask Technology 2008 - Effects of heated substrates on bimetallic thermal resist for lithography and grayscale photomask applications

Dykes, James M., Kawahira, Hiroichi, Zurbrick, Larry S., Tsui, Polly, Leung, Jenny, Chapman, Glenn H.
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Volume:
7122
Year:
2008
Language:
english
DOI:
10.1117/12.801560
File:
PDF, 3.13 MB
english, 2008
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