SPIE Proceedings [SPIE International Symposium on Instrumentation Science and Technology - Shenyang, China (Monday 15 September 2008)] Fifth International Symposium on Instrumentation Science and Technology - Dimensional nanometrology at the National Physical Laboratory
Yacoot, Andrew, Tan, Jiubin, Wen, Xianfang, Leach, Richard, Hughes, Ben, Giusca, Claudiu, Jones, Christopher, Wilson, AlanVolume:
7133
Year:
2008
Language:
english
DOI:
10.1117/12.807994
File:
PDF, 294 KB
english, 2008