SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, CA (Sunday 2 August 2009)] Instrumentation, Metrology, and Standards for Nanomanufacturing III - Imaging comparison of reflection and transmission grating systems
Wan, Lingyu, Postek, Michael T., Allgair, John A., Zhang, Weiping, Yang, Qingyi, Shen, XiaomingVolume:
7405
Year:
2009
Language:
english
DOI:
10.1117/12.825461
File:
PDF, 1.47 MB
english, 2009