SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, CA (Monday 14 September 2009)] Photomask Technology 2009 - 3D Si aperture-plates combined with programmable blanking-plates for multi-beam mask writing
Letzkus, Florian, Zurbrick, Larry S., Montgomery, M. Warren, Irmscher, Mathias, Jurisch, Michael, Platzgummer, Elmar, Klein, Christof, Loeschner, HansVolume:
7488
Year:
2009
Language:
english
DOI:
10.1117/12.829630
File:
PDF, 4.00 MB
english, 2009