SPIE Proceedings [SPIE 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical devices and Systems - Chengdu, China (Wednesday 19 November 2008)] 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - MEMS testing and applications in automotive and aerospace industries
Ma, Zhichun, Han, Sen, Kameyama, Masaomi, Chen, Xuyuan, Luo, XiangangVolume:
7284
Year:
2008
Language:
english
DOI:
10.1117/12.832067
File:
PDF, 899 KB
english, 2008