SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 23 January 2010)] Synthesis and Photonics of Nanoscale Materials VII - Nanostructured polymers by a compact laser plasma EUV source
Fiedorowicz, Henryk, Dubowski, Jan J., Geohegan, David B., Bartnik, Andrzej, Jarocki, Roman, Träger, Frank, Kostecki, Jerzy, Szczurek, MiroslawVolume:
7586
Year:
2010
Language:
english
DOI:
10.1117/12.841682
File:
PDF, 12.90 MB
english, 2010