![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Suppressing ringing effects from very strong off-axis illumination with novel OPC approaches for low k1 lithography
Cork, Chris, Dusa, Mircea V., Conley, Will, Amoroso, Frank, Poonawala, Amyn, Jang, Stephen, Lucas, KevinVolume:
7640
Year:
2010
Language:
english
DOI:
10.1117/12.847977
File:
PDF, 8.40 MB
english, 2010