SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Process window and integration results for full-chip model-based assist-feature placement at the 32 nm node and below

Li, Ji, Dusa, Mircea V., Conley, Will, Luk-Pat, Gerard, Poonawala, Amyn, Lucas, Kevin, Painter, Ben
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Volume:
7640
Year:
2010
Language:
english
DOI:
10.1117/12.848443
File:
PDF, 2.05 MB
english, 2010
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