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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - One-shot measurement of surface profile using an astigmatic microscope system

Kang, C.-S., Gorecki, Christophe, Asundi, Anand K., Lee, J.-U., Kim, J. W., Osten, Wolfgang, Kim, J.-A., Jin, J., Eom, T. B.
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Volume:
7718
Year:
2010
Language:
english
DOI:
10.1117/12.854124
File:
PDF, 1.29 MB
english, 2010
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