SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Interferometry XV: Techniques and Analysis - Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets
Sasaki, Osami, Towers, Catherine E., Schmit, Joanna, Choi, Samuel, Suzuki, Takamasa, Creath, KatherineVolume:
7790
Year:
2010
Language:
english
DOI:
10.1117/12.861534
File:
PDF, 311 KB
english, 2010