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SPIE Proceedings [SPIE Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China (Sunday 8 August 2010)] Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Modeling and simulation of through-focus images for dimensional analysis of nanoscale structures
Chen, Xiuguo, Liu, Shiyuan, Zhang, Chuanwei, Ma, Yuan, Zhu, JinlongVolume:
7544
Year:
2010
Language:
english
DOI:
10.1117/12.885232
File:
PDF, 380 KB
english, 2010