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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Optical characterization of three-dimensional structures within a DRAM capacitor
Krupinski, Martin, Lehmann, Peter H., Osten, Wolfgang, Kasic, Alexander, Hecht, Thomas, Gastinger, Kay, Klude, Matthias, Heitmann, Johannes, Erben, Elke, Mikolajick, ThomasVolume:
8082
Year:
2011
Language:
english
DOI:
10.1117/12.888973
File:
PDF, 525 KB
english, 2011