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SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - A novel MEMS field emission accelerometer based on silicon nanotips array
Chen, Li, Wang, Yuelin, Xie, Huikai, Wen, Zhi-yu, Wen, Zhong-quan, Jin, Yufeng, Liu, Hai-taoVolume:
8191
Year:
2011
Language:
english
DOI:
10.1117/12.901052
File:
PDF, 1.49 MB
english, 2011