SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Photomask Iinewidth Measurement Correlation Techniques Using The Standard Reference Material (SRM) 474 National Bureau Of Standards (NBS) Linewidth Standard
Caprari, F., Nyyssonen, DianaVolume:
342
Year:
1982
Language:
english
DOI:
10.1117/12.933673
File:
PDF, 2.10 MB
english, 1982