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SPIE Proceedings [SPIE Cambridge Symposium-Fiber/LASE '86 - Cambridge, MA (Monday 18 August 1986)] Integrated Optical Circuit Engineering IV - Mask Making Using A Laser Writing System
Gauthier, Robert, Chrostowski, Jacek, Paton, Barry, Cada, Michael, Mentzer, Mark A., Sriram, SriramVolume:
704
Year:
1987
Language:
english
DOI:
10.1117/12.937202
File:
PDF, 93 KB
english, 1987