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SPIE Proceedings [SPIE 22nd Annual Technical Symposium - San Diego (Monday 28 August 1978)] Advances in Optical Metrology I - A Coaxial Interferometer With Low Mapping Distortion
Slomba, Albert F., Figoski, John W., Balasubramanian, N., Wyant, James C.Volume:
153
Year:
1978
Language:
english
DOI:
10.1117/12.938231
File:
PDF, 173 KB
english, 1978