SPIE Proceedings [SPIE 27th Annual Techincal Symposium - San Diego (Tuesday 23 August 1983)] X-Ray Lithography and Applications of Soft X-Rays to Technology - Optimization Of The Optics Matching A Storage Ring To An X-Ray Lithography Camera
Haelbich, Rolf P., Wilson, Alan D.Volume:
448
Year:
1984
Language:
english
DOI:
10.1117/12.939211
File:
PDF, 215 KB
english, 1984