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SPIE Proceedings [SPIE 29th Annual Technical Symposium - San Diego (Tuesday 20 August 1985)] Diffraction Phenomena in Optical Engineering Applications - Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)
House, R. A., Petty, R . D., Johnston, J. J., Key, B. R., Denton, G. J., Byrne, Dale M., Harvey, James E.Volume:
560
Year:
1986
Language:
english
DOI:
10.1117/12.949615
File:
PDF, 649 KB
english, 1986