SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII - On Plasma-Film Interactions In rf Sputtered a-Si:H and a-Ge:H
Shinar, J., Mitra, S., Wu, H.-S., Granqvist, Claes-Goeran, Lampert, Carl M.Volume:
1016
Year:
1989
Language:
english
DOI:
10.1117/12.949920
File:
PDF, 300 KB
english, 1989