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SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Advances in Resist Technology and Processing VI - Evaporated Fatty Acid Resist Process
Kato, Hisato, Morita, Shinzo, Tawata, Masahiro, Hattori, Shuzo, Reichmanis, ElsaVolume:
1086
Year:
1989
Language:
english
DOI:
10.1117/12.953035
File:
PDF, 3.84 MB
english, 1989