SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Surface and Interface Analysis of Microelectronic Materials Processing and Growth - In situ Characterization Of MBE Grown Surfaces And Interfaces By Grazing Incidence X-Ray Diffraction
Pinchaux, R., Sauvage-Simkin, M., Massies, J., Jedrecy, N., Greiser, N., Etgens, V. H., Brillson, Leonard J., Pollak, Fred H.Volume:
1186
Year:
1990
Language:
english
DOI:
10.1117/12.963911
File:
PDF, 2.76 MB
english, 1990