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Hot-Wire Chemical Vapour Deposition for Silicon Nitride Waveguides
Dominguez Bucio, T., Tarazona, A., Khokhar, A. Z., Mashanovich, G. Z., Gardes, F. Y.Volume:
72
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07204.0269ecst
Date:
May, 2016
File:
PDF, 388 KB
english, 2016