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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Inverse-Vg Dependence of PBTI Lifetime of HfSiON Gate Dielectrics Measured by a High-Temperature Pulsed-IV Method
Ootsuka, Fumio, Eimori, Takahia, Nara, Yasuo, Ohji, YuzuruVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2727403
File:
PDF, 192 KB
english, 2007