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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Understanding and Controlling Pore Etching in Semiconductors
Foell, Helmut, Carstensen, Juergen, Foca, Eugen, Leisner, MalteVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2731199
File:
PDF, 1.95 MB
english, 2007