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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Low-Temperature VUV-Stimulated MO CVD Process of Palladium Layer Deposition
Kuchumov, Boris M., Koretskaya, Tat'yana P., Shevtsov, Yuriy V., Trubin, Sergey V., Zharkova, Galina I., Danilovich, Vladimir S., Igumenov, Igor K., Kruchinin, VladimirYear:
2009
Language:
english
DOI:
10.1149/1.3207685
File:
PDF, 859 KB
english, 2009