Converting SOI to sSOI through Amorphization and...

ECS Journal of Solid State Science and Technology 2015 Vol. 4; Iss. 9

Converting SOI to sSOI through Amorphization and Crystallization: Material Analysis and Device Demonstration

Maitrejean, S., Loubet, N., Augendre, E., Morin, P., Reboh, S., Bernier, N., Wacquez, R., Lherron, B., Bonnevialle, A., Liu, Q., Hartmann, J. M., He, H., Halimaoui, A., Li, J., Pilorget, S., Kanyandek
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Volume:
4
Year:
2015
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0171509jss
File:
PDF, 1.67 MB
english, 2015
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