Study of Nitrogen Diffusion Profile of Low Resistivity...

Study of Nitrogen Diffusion Profile of Low Resistivity Diffusion Barrier by Resputtering Technology

Tsao, Jung-Chih, Liu, Chuan-Pu, Wang, Ying-Lang, Chen, Kei-Wei
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Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.c019
Date:
February, 2009
File:
PDF, 1.33 MB
english, 2009
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